| Chemically Stable Atomic-Layer-Deposited Al2O3 Films for Processability M Broas, O Kanninen, V Vuorinen, M Tilli, M Paulasto-Kröckel ACS omega 2 (7), 3390-3398, 2017 | 68 | 2017 |
| Corrosion protection of steel with multilayer coatings: Improving the sealing properties of physical vapor deposition CrN coatings with Al2O3/TiO2 atomic layer deposition … J Leppäniemi, P Sippola, M Broas, J Aromaa, H Lipsanen, J Koskinen Thin Solid Films 627, 59-68, 2017 | 59 | 2017 |
| Shock impact reliability and failure analysis of a three-axis MEMS gyroscope J Li, M Broas, J Makkonen, TT Mattila, J Hokka, M Paulasto-Kröckel Journal of microelectromechanical systems 23 (2), 347-355, 2013 | 52 | 2013 |
| Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films M Broas, P Sippola, T Sajavaara, V Vuorinen, A Pyymaki Perros, ... Journal of vacuum science & technology A 34 (4), 2016 | 38 | 2016 |
| Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma V Rontu, P Sippola, M Broas, G Ross, T Sajavaara, H Lipsanen, ... Journal of Vacuum Science & Technology A 36 (2), 2018 | 27 | 2018 |
| Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films M Broas, H Jiang, A Graff, T Sajavaara, V Vuorinen, M Paulasto-Kröckel Applied Physics Letters 111 (14), 2017 | 20 | 2017 |
| Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading J Li, M Broas, J Raami, TT Mattila, M Paulasto-Kröckel Microelectronics Reliability 54 (6-7), 1228-1234, 2014 | 19 | 2014 |
| Reliability assessment of a MEMS microphone under shock impact loading J Li, J Makkonen, M Broas, J Hokka, TT Mattila, M Paulasto-Kröckel, ... 2013 14th International Conference on Thermal, Mechanical and Multi-Physics …, 2013 | 18 | 2013 |
| Correlation of gate leakage and local strain distribution in GaN/AlGaN HEMT structures M Broas, A Graff, M Simon-Najasek, D Poppitz, F Altmann, H Jung, ... Microelectronics Reliability 64, 541-546, 2016 | 12 | 2016 |
| Reliability assessment of MEMS devices—A case study of a 3 axis gyroscope J Makkonen, M Broas, J Li, J Hokka, TT Mattila, M Paulasto-Kröckel 2012 4th Electronic System-Integration Technology Conference, 1-8, 2012 | 10 | 2012 |
| Methods for reliability assessment of MEMS devices—Case studies of a MEMS microphone and a 3-axis MEMS gyroscope J Hokka, J Raami, H Hyvönen, M Broas, J Makkonen, J Li, TT Mattila, ... 2012 IEEE 62nd Electronic Components and Technology Conference, 62-69, 2012 | 10 | 2012 |
| Interfacial void segregation of Cl in Cu-Sn micro-connects G Ross, X Tao, M Broas, N Mäntyoja, V Vuorinen, A Graff, F Altmann, ... Electronic Materials Letters, 1-6, 2017 | 9 | 2017 |
| Thermodynamic reassessment of the Au-Pt-Sn system and microstructural evolution of the (AuSn) eut-Pt interconnection H Dong, V Vuorinen, M Broas, M Paulasto-Kröckel Journal of Alloys and Compounds 688, 388-398, 2016 | 9 | 2016 |
| Robustness and reliability of MOEMS for miniature spectrometers A Rissanen, M Broas, J Hokka, T Mattila, J Antila, M Laamanen, H Saari Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and …, 2013 | 6 | 2013 |
| In-situ annealing characterization of atomic-layer-deposited Al2O3 in N2, H2 and vacuum atmospheres M Broas, J Lemettinen, T Sajavaara, M Tilli, V Vuorinen, S Suihkonen, ... Thin Solid Films 682, 147-155, 2019 | 5 | 2019 |
| Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone M Broas, J Li, X Liu, Y Ge, A Peltonen, TT Mattila, M Paulasto-Kröckel 2015 IEEE 65th Electronic Components and Technology Conference (ECTC), 453-459, 2015 | 5 | 2015 |
| Reliability of wafer-level SLID bonds for MEMS encapsulation H Xu, M Broas, H Dong, V Vuorinen, T Suni, S Vahanen, P Monnoyer, ... Microelectronics Packaging Conference (EMPC), 2013 European, 2013 | 5 | 2013 |
| A comparative reliability study of copper-plated glass vias, drilled with CO2 and ArF excimer lasers M Broas, K Demir, Y Sato, V Sundaram, R Tummala Proceedings of the 5th Electronics System-integration Technology Conference …, 2014 | 3 | 2014 |
| Strain measurements at AlGaN/GaN HEMT structures on Silicon substrates D Poppitz, A Graff, M Simon‐Najasek, M Broas, F Altmann European Microscopy Congress 2016: Proceedings, 2016 | 2 | 2016 |
| MOCVD Al (Ga) N Insulator for Alternative Silicon-On-Insulator Structure G Ross, V Luntinen, M Broas, S Suihkonen, T Tuomi, A Lankinen, ... 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC), 1-6, 2020 | 1 | 2020 |
Vesa VuorinenAalto UniversityVerified email at tkk.fi
