Brett B. Lewis
Brett B. Lewis
Carl Zeiss SMT, LLC
Подтвержден адрес электронной почты в домене zeiss.com
Название
Процитировано
Процитировано
Год
Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition
JD Fowlkes, R Winkler, BB Lewis, MG Stanford, H Plank, PD Rack
ACS nano 10 (6), 6163-6172, 2016
1102016
Direct-write 3D nanoprinting of plasmonic structures
R Winkler, FP Schmidt, U Haselmann, JD Fowlkes, BB Lewis, ...
ACS applied materials & interfaces 9 (9), 8233-8240, 2017
942017
Electron-beam-assisted oxygen purification at low temperatures for electron-beam-induced pt deposits: towards pure and high-fidelity nanostructures
H Plank, JH Noh, JD Fowlkes, K Lester, BB Lewis, PD Rack
ACS applied materials & interfaces 6 (2), 1018-1024, 2014
682014
Purification of nanoscale electron-beam-induced platinum deposits via a pulsed laser-induced oxidation reaction
MG Stanford, BB Lewis, JH Noh, JD Fowlkes, NA Roberts, H Plank, ...
ACS applied materials & interfaces 6 (23), 21256-21263, 2014
462014
Advanced nanoscale patterning and material synthesis with gas field helium and neon ion beams
MG Stanford, BB Lewis, K Mahady, JD Fowlkes, PD Rack
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2017
452017
High-fidelity 3D-nanoprinting via focused electron beams: computer-aided design (3BID)
JD Fowlkes, R Winkler, BB Lewis, A Fernandez-Pacheco, L Skoric, ...
ACS Applied Nano Materials 1 (3), 1028-1041, 2018
382018
Nanoscale electron beam-induced deposition and purification of ruthenium for extreme ultraviolet lithography mask repair
JH Noh, MG Stanford, BB Lewis, JD Fowlkes, H Plank, PD Rack
Applied Physics A 117 (4), 1705-1713, 2014
322014
High-fidelity 3D-nanoprinting via focused electron beams: Growth fundamentals
R Winkler, BB Lewis, JD Fowlkes, PD Rack, H Plank
ACS Applied Nano Materials 1 (3), 1014-1027, 2018
312018
In situ mitigation of subsurface and peripheral focused ion beam damage via simultaneous pulsed laser heating
MG Stanford, BB Lewis, V Iberi, JD Fowlkes, S Tan, R Livengood, ...
Small 12 (13), 1779-1787, 2016
292016
Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition
BB Lewis, MG Stanford, JD Fowlkes, K Lester, H Plank, PD Rack
Beilstein journal of nanotechnology 6 (1), 907-918, 2015
242015
Inert gas enhanced laser-assisted purification of platinum electron-beam-induced deposits
MG Stanford, BB Lewis, JH Noh, JD Fowlkes, PD Rack
ACS applied materials & interfaces 7 (35), 19579-19588, 2015
232015
Laser-Assisted Focused He+ Ion Beam Induced Etching with and without XeF2 Gas Assist
MG Stanford, K Mahady, BB Lewis, JD Fowlkes, S Tan, R Livengood, ...
ACS applied materials & interfaces 8 (42), 29155-29162, 2016
212016
3D Nanoprinting via laser-assisted electron beam induced deposition: growth kinetics, enhanced purity, and electrical resistivity
BB Lewis, R Winkler, X Sang, PR Pudasaini, MG Stanford, H Plank, ...
Beilstein Journal of Nanotechnology 8, 801-812, 2017
182017
Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition
BB Lewis, BA Mound, B Srijanto, JD Fowlkes, GM Pharr, PD Rack
Nanoscale 9 (42), 16349-16356, 2017
172017
Electron nanoprobe induced oxidation: a simulation of direct-write purification
JD Fowlkes, B Geier, BB Lewis, PD Rack, MG Stanford, R Winkler, ...
Physical Chemistry Chemical Physics 17 (28), 18294-18304, 2015
172015
Evaluation of mask repair strategies via focused electron, helium, and neon beam induced processing for EUV applications
CM Gonzalez, W Slingenbergh, R Timilsina, JH Noh, MG Stanford, ...
Extreme Ultraviolet (EUV) Lithography V 9048, 90480M, 2014
132014
Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF2: Enhanced Reaction Rate and Precursor Transport
JH Noh, JD Fowlkes, R Timilsina, MG Stanford, BB Lewis, PD Rack
ACS applied materials & interfaces 7 (7), 4179-4184, 2015
52015
ACS Appl. Mater
R Winkler, FP Schmidt, U Haselmann, JD Fowlkes, BB Lewis, ...
Interfaces 9, 8233, 2017
32017
NanoFab with SIMS-Recent Results from the BAM-L200 Analytical Standard and Semiconductor Samples
B Lewis, F Khanom, J Notte
Microscopy and Microanalysis 24 (S1), 850-851, 2018
22018
NanoFab SIMS: High Spatial Resolution Imaging and Analysis Using Inert-Gas Ion Beams
S Sijbrandij, A Lombardi, A Sireuil, F Khanom, B Lewis, C Guillermier, ...
Microscopy Today 27 (3), 22-27, 2019
12019
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