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Isabelle Trimaille
Isabelle Trimaille
Research Engineer, Sorbonne Université
Подтвержден адрес электронной почты в домене upmc.fr
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Процитировано
Процитировано
Год
Interface and material characterization of thin Al2O3 layers deposited by ALD using TMA/H2O
LG Gosset, JF Damlencourt, O Renault, D Rouchon, P Holliger, ...
Journal of non-crystalline solids 303 (1), 17-23, 2002
1642002
Growth of SiO2 on SiC by dry thermal oxidation: mechanisms
I Vickridge, J Ganem, Y Hoshino, I Trimaille
Journal of Physics D: Applied Physics 40 (20), 6254, 2007
972007
Use of 18O isotopic labelling to study thermal dry oxidation of silicon as a function of temperature and pressure
I Trimaille, S Rigo
Applied Surface Science 39 (1-4), 65-80, 1989
821989
Limiting step involved in the thermal growth of silicon oxide films on silicon carbide
IC Vickridge, I Trimaille, JJ Ganem, S Rigo, C Radtke, IJR Baumvol, ...
Physical review letters 89 (25), 256102, 2002
522002
Mechanisms of thermal nitridation of silicon
IJR Baumvol, FC Stedile, JJ Ganem, S Rigo, I Trimaille
Journal of the Electrochemical Society 142 (4), 1205-1214, 1995
521995
Incorporation of oxygen and nitrogen in ultrathin films of annealed in NO
IJR Baumvol, JJ Ganem, LG Gosset, I Trimaille, S Rigo
Applied physics letters 72 (23), 2999-3001, 1998
401998
Dry oxidation mechanisms of thin dielectric films formed under N2O using isotopic tracing methods
JJ Ganem, S Rigo, I Trimaille, IJR Baumvol, FC Stedile
Applied physics letters 68 (17), 2366-2368, 1996
401996
Diffusion of near surface defects during the thermal oxidation of silicon
JJ Ganem, I Trimaille, P André, S Rigo, FC Stedile, IJR Baumvol
Journal of applied physics 81 (12), 8109-8111, 1997
391997
Thermal nitridation of SiO2 films in ammonia: The role of hydrogen
IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Journal of The Electrochemical Society 143 (4), 1426-1434, 1996
331996
A study of the initial stages of the oxidation of silicon using 18O2 and RTP
JJ Ganem, G Battistig, S Rigo, I Trimaille
Applied surface science 65, 647-653, 1993
311993
Study of thin hafnium oxides deposited by atomic layer deposition
JJ Ganem, I Trimaille, IC Vickridge, D Blin, F Martin
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2004
262004
Thermal Nitridation of SiO2 Films in Ammonia Isotopic Tracing of Nitrogen and Oxygen in the Initial Stages
IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Journal of The Electrochemical Society 143 (9), 2938-2945, 1996
261996
Oxygen isotopic exchange occurring during dry thermal oxidation of 6H SiC
IC Vickridge, D Tromson, I Trimaille, JJ Ganem, E Szilagyi, G Battistig
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2002
252002
Formation of modified interfaces with intrinsic low defect concentrations
LG Gosset, JJ Ganem, HJ Von Bardeleben, S Rigo, I Trimaille, JL Cantin, ...
Journal of applied physics 85 (7), 3661-3665, 1999
251999
Nitrogen transport during rapid thermal growth of silicon oxynitride films in N2O
IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Applied physics letters 69 (16), 2385-2387, 1996
251996
Effects of sputter deposition parameters and post-deposition annealing on the electrical characteristics of LaAlO3 dielectric films on Si
V Edon, MC Hugon, B Agius, L Miotti, C Radtke, F Tatsch, JJ Ganem, ...
Applied Physics A 83 (2), 289-293, 2006
242006
Isotopic tracing during rapid thermal growth of silicon oxynitride films on Si in and
IJR Baumvol, FC Stedile, JJ Ganem, I Trimaille, S Rigo
Applied physics letters 70 (15), 2007-2009, 1997
231997
Time dependence of the oxygen exchange at the interface during dry thermal oxidation of silicon
T Åkermark, LG Gosset, JJ Ganem, I Trimaille, I Vickridge, S Rigo
Journal of applied physics 86 (2), 1153-1155, 1999
201999
IBA study of the growth mechanisms of very thin silicon oxide films: the effect of wafer cleaning
FC Stedile, IJR Baumvol, JJ Ganem, S Rigo, I Trimaille, G Battistig, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1994
191994
Thermal oxidation of 6H-SiC studied by oxygen isotopic tracing and narrow nuclear resonance profiling
I Trimaille, JJ Ganem, IC Vickridge, S Rigo, G Battistig, E Szilagyi, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2004
182004
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Статьи 1–20