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Anil G. Khairnar
Anil G. Khairnar
K.R.T. Arts, B.H. Commerce and A.M. Science College, Nashik and North Maharashtra University
Verified email at nmu.ac.in
Title
Cited by
Cited by
Year
Structural and electrical characteristics of RF-sputtered HfO< sub> 2</sub> high-k based MOS capacitors
PM Tirmali, AG Khairnar, BN Joshi, AM Mahajan
Solid-State Electronics 62 (1), 44-47, 2011
892011
Effect of post-deposition annealing temperature on RF-Sputtered HfO< sub> 2</sub> thin film for advanced CMOS technology
AG Khairnar, AM Mahajan
Solid State Sciences 15, 24-28, 2012
80*2012
Sol–gel deposited ceria thin films as gate dielectric for CMOS technology
AG Khairnar, AM Mahajan
Bulletin of Materials Science 36 (2), 259-263, 2013
312013
Electrical properties of MOS capacitors formed by PEALD grown Al2O3 on silicon
AM Mahajan, AG Khairnar, BJ Thibeault
Semiconductors Ôèçèêà è òåõíèêà ïîëóïðîâîäíèêîâ 48 (4), 2014
282014
HfO2 gate dielectric on Ge (1 1 1) with ultrathin nitride interfacial layer formed by rapid thermal NH3 treatment
KS Agrawal, VS Patil, AG Khairnar, AM Mahajan
Applied Surface Science 364, 747-751, 2016
212016
Structural and electrical properties of ultra-thin high-k ZrO2 film on nitride passivated Ge (100) prepared by PEALD
VS Patil, KS Agrawal, AG Khairnar, BJ Thibeault, AM Mahajan
Materials Science in Semiconductor Processing 56, 277-281, 2016
182016
High Dielectric Constant ZrO2 Films by Atomic Layer Deposition Technique on Germanium Substrates
AM Mahajan, AG Khairnar, BJ Thibeault
Silicon 8 (3), 345-350, 2016
172016
Preparation of rare earth CeO2 thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors
KS Agrawal, VS Patil, AG Khairnar, AM Mahajan
Journal of Materials Science: Materials in Electronics 28, 12503-12508, 2017
122017
Electrical properties of HfO2 high-k thin-film MOS capacitors for advanced CMOS technology
AG Khairnar, LS Patil, RS Salunke, AM Mahajan
Indian Journal of Physics 89 (11), 1177-1181, 2015
82015
Symthesis of Cerium Dioxide High-k Thin Films as a Gate Dielectric in MOS Capacitor
AG Khairnar, YS Mhaisagar, AM Mahajan
Æóðíàë íàíî-òà åëåêòðîííî¿ ô³çèêè, 03002-1-03002-3, 2013
62013
Ninety percent drug utilization in patients of upper respiratory infections
L Patil, A Khairnar
Int. Res. J. Pharm 4 (6), 189-93, 2013
52013
accepted in Semiconductors
AM Mahajan, AG Khairnar, BJ Thibeault
Springer) July, 2013
52013
Pt-Ti/ALD-Al 2 O 3/p-Si MOS Capacitors for Future ULSI Technology
AM Mahajan, AG Khairnar, BJ Thibeault
J. Nano- Electron. Phys. 3 (1), 647-650, 2011
52011
Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface
VS Patil, KS Agrawal, AG Khairnar, BJ Thibeault, AM Mahajan
Materials Research Bulletin 87, 208-213, 2017
42017
Deposition and characterization of high k dielectric thin films for mos capacitors
AG Khairnar
North Maharashtra University Jalgaon, 0
4*
Enhancement in mechanical properties of silica low-k thin films using wet chemical technique
YS Mhaisagar, AS Gaikad, AG Khairnar, AM Mahajan
Indian Journal of Pure & Applied Physics (IJPAP) 54 (7), 439-442, 2016
32016
PEALD grown high-k ZrO2 thin films on SiC group IV compound semiconductor
AG Khairnar, VS Patil, KS Agrawal, RS Salunke, AM Mahajan
Semiconductors 51, 131-133, 2017
12017
Investigation of Current Conduction Mechanism in HfO2 Thin Film on Silicon Substrate
AG Khairnar, KS Agrawal, VS Patil, AM Mahajan
Physics of Semiconductor Devices: 17th International Workshop on the Physics …, 2014
12014
Capacitance-Voltage Measurement of SiO2/GeOxNy Gate Stack on Surface Passivated Germanium
AG Khairnar, VS Patil, AM Mahajan
Physics of Semiconductor Devices: 17th International Workshop on the Physics …, 2014
12014
Surface Passivation of Germanium Using NH3 Ambient in RTP for High Mobility MOS Structure
AG Khairnar, YS Mhaisagar, AM Mahajan
J. Nano- Electron. Phys. 5 (2), 02009-1-02009-3, 2013
12013
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Articles 1–20