| Acoustic sensor as proximity detector A Samsavar, T McWaid, S Yudin US Patent 5,852,232, 1998 | 136 | 1998 |
| Design of an atomic force microscope with interferometric position control J Schneir, TH McWaid, J Alexander, BP Wilfley Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1994 | 119 | 1994 |
| Thermal contact resistance across pressed metal contacts in a vacuum environment T McWaid, E Marschall International journal of heat and mass transfer 35 (11), 2911-2920, 1992 | 116 | 1992 |
| Optical profilometer combined with stylus probe measurement device A Samsavar, M Weber, T McWaid, WP Kuhn, RE Parks US Patent 5,955,661, 1999 | 94 | 1999 |
| Application of the modified Greenwood and Williamson contact model for the prediction of thermal contact resistance TH McWaid, E Marschall Wear 152 (2), 263-277, 1992 | 37 | 1992 |
| System for sensing a sample T McWaid, P Panagas, SG Eaton, A Samsavar, WR Wheeler US Patent 6,520,005, 2003 | 27 | 2003 |
| Increasing the value of atomic force microscopy process metrology using a high‐accuracy scanner, tip characterization, and morphological image analysis J Schneir, JS Villarrubia, TH McWaid, VW Tsai, R Dixson Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 26 | 1996 |
| Increasing the value of atomic force microscopy process metrology using a high‐accuracy scanner, tip characterization, and morphological image analysis J Schneir, JS Villarrubia, TH McWaid, VW Tsai, R Dixson Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996 | 26 | 1996 |
| Progress on accurate metrology of pitch, height, roughness, and width artifacts using an atomic force microscope J Schneir, TH McWaid, RG Dixson, VWC Tsai, JS Villarrubia, ED Williams, ... Integrated Circuit Metrology, Inspection, and Process Control IX 2439, 401-415, 1995 | 15 | 1995 |
| Methods divergence between measurements of micrometer and sub-micrometer surface features TH McWaid, TV Vorburger, J Fu, JF Song, E Whitenton Nanotechnology 5 (1), 33, 1994 | 15 | 1994 |
| A comparison of elastic and plastic contact models for the prediction of thermal contact conductance TH McWaid, E Marschall Wärme-und Stoffübertragung 28 (8), 441-448, 1993 | 15 | 1993 |
| Instrument for calibrating atomic force microscope standards J Schneir, TH McWaid, TV Vorburger Integrated Circuit Metrology, Inspection, and Process Control VIII 2196, 166-180, 1994 | 13 | 1994 |
| Toward accurate linewidth metrology using atomic force microscopy and tip characterization RG Dixson, J Schneir, TH McWaid, NT Sullivan, VWC Tsai, SH Zaidi, ... Metrology, Inspection, and Process Control for Microlithography X 2725, 589-607, 1996 | 12 | 1996 |
| Measurement of a CD and sidewall angle artifact with two-dimensional CD AFM metrology RG Dixson, NT Sullivan, J Schneir, TH McWaid, VWC Tsai, J Prochazka, ... Metrology, Inspection, and Process Control for Microlithography X 2725, 572-588, 1996 | 12 | 1996 |
| Effects of thin films on interferometric step height measurements TH McWaid, TV Vorburger, JF Song, D Chandler-Horowitz Interferometry: Surface Characterization and Testing 1776, 2-13, 1992 | 11 | 1992 |
| System for sensing a sample T McWaid, P Panagas, S Eaton, A Samsavar, W Wheeler US Patent App. 10/330,901, 2003 | 7 | 2003 |
| Improved photochronic flow visualization technique T McWaid, E Marschall Experimental Thermal and Fluid Science 3 (2), 232-241, 1990 | 7 | 1990 |
| Toward Accurate Measurements of Pitch, Height, and Width Artifacts with the NIST Calibrated AFM RG Dixson, TV Vorburger, P Sullivan, VW Tsai, T Mcwaid Ronald G. Dixson, Theodore V. Vorburger, P Sullivan, V W. Tsai, T Mcwaid 14 …, 1996 | 4 | 1996 |
| XUV optics characterization at the National Institute of Standards and Technology RN Watts, C Tarrio, TB Lucatorto, RP Madden, RD Deslattes, A Caticha, ... Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1993 | 4 | 1993 |
| System for sensing a sample T McWaid, P Panagas, SG Eaton, A Samsavar, WR Wheeler US Patent 6,931,917, 2005 | 3 | 2005 |
