Toward accurate composition analysis of GaN and AlGaN using atom probe tomography R Morris, R Cuduvally, D Melkonyan, C Fleischmann, M Zhao, L Arnoldi, ... Journal of Vacuum Science & Technology B 36 (3), 2018 | 29 | 2018 |
Self Focusing SIMS: Probing thin film composition in very confined volumes A Franquet, B Douhard, D Melkonyan, P Favia, T Conard, W Vandervorst Applied Surface Science 365, 143-152, 2016 | 29 | 2016 |
Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives JP Barnes, A Grenier, I Mouton, S Barraud, G Audoit, J Bogdanowicz, ... Scripta Materialia 148, 91-97, 2018 | 27 | 2018 |
Atom probe tomography analysis of SiGe fins embedded in SiO2: Facts and artefacts D Melkonyan, C Fleischmann, L Arnoldi, J Demeulemeester, A Kumar, ... Ultramicroscopy 179, 100-107, 2017 | 26 | 2017 |
Revealing the 3-dimensional shape of atom probe tips by atomic force microscopy C Fleischmann, K Paredis, D Melkonyan, W Vandervorst Ultramicroscopy 194, 221-226, 2018 | 18 | 2018 |
Atom probe of GaN/AlGaN heterostructures: The role of electric field, sample crystallography and laser excitation on quantification RJH Morris, R Cuduvally, D Melkonyan, M Zhao, P van der Heide, ... Ultramicroscopy 206, 112813, 2019 | 15 | 2019 |
On the interplay between relaxation, defect formation, and atomic Sn distribution in Ge (1− x) Sn (x) unraveled with atom probe tomography A Kumar, J Demeulemeester, J Bogdanowicz, J Bran, D Melkonyan, ... Journal of Applied Physics 118 (2), 2015 | 15 | 2015 |
Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs R Cuduvally, RJH Morris, P Ferrari, J Bogdanowicz, C Fleischmann, ... Ultramicroscopy 210, 112918, 2020 | 12 | 2020 |
Wet-chemical etching of atom probe tips for artefact free analyses of nanoscaled semiconductor structures D Melkonyan, C Fleischmann, A Veloso, A Franquet, J Bogdanowicz, ... Ultramicroscopy 186, 1-8, 2018 | 9 | 2018 |
Measurement of the apex temperature of a nanoscale semiconducting field emitter illuminated by a femtosecond pulsed laser A Kumar, J Bogdanowicz, J Demeulemeester, J Bran, D Melkonyan, ... Journal of Applied Physics 124 (24), 2018 | 8 | 2018 |
Challenges on surface conditioning in 3D device architectures: triple-gate FinFETs, gate-all-around lateral and vertical nanowire FETs A Veloso, V Paraschiv, E Vecchio, K Devriendt, W Li, E Simoen, BT Chan, ... ECS Transactions 80 (2), 3, 2017 | 8 | 2017 |
Composition analysis of III–V materials grown in nanostructures: The self-focusing-SIMS approach A Franquet, B Douhard, T Conard, D Melkonyan, W Vandervorst Journal of Vacuum Science & Technology B 34 (3), 2016 | 8 | 2016 |
Electrical properties of patterned photoactive layers in organic photovoltaic modules JG Tait, L La Notte, D Melkonyan, R Gehlhaar, D Cheyns, A Reale, ... Solar Energy Materials and Solar Cells 144, 493-499, 2016 | 8 | 2016 |
Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2 D Melkonyan, L Arnoldi, C Fleischmann, A Kumar, F Vurpillot, ... | 1 | 2016 |
Quantification of group IV alloys in confined structures: the self focusing SIMS approach A Franquet, B Douhard, D Melkonyan, J Delmotte, J Demeulemeester, ... | 1 | 2014 |
Atomic scale observation of atom distributions in 3D devices using atom probe tomography D Melkonyan | | 2019 |
Opportunities and Challenges in APT Metrology for Semiconductor Applications C Fleischmann, R Cuduvally, R Morris, D Melkonyan, JO de Beeck, ... Microscopy and Microanalysis 25 (S2), 312-313, 2019 | | 2019 |
Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy J Scheerder, C Fleischmann, M Dialameh, D Melkonyan, R Morris, ... | | 2019 |
Quantitative compositional analysis of compound semiconductors by atom probe tomography R Cuduvally, R Morris, J Bogdanowicz, D Melkonyan, L Arnoldi, ... | | 2018 |
A critical view on the accuracy of dopant profiling in atom probe tomography: The case of boron in silicon D Melkonyan, C Fleischmann, J Bogdanowicz, R Morris, R Cuduvally, ... | | 2018 |