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Dmitriy Voronov
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A 10,000 groove/mm multilayer coated grating for EUV spectroscopy
DL Voronov, EH Anderson, R Cambie, S Cabrini, SD Dhuey, LI Goray, ...
Optics Express 19 (7), 6320-6325, 2011
802011
Investigation of antirelaxation coatings for alkali-metal vapor cells using surface science techniques
SJ Seltzer, DJ Michalak, MH Donaldson, MV Balabas, SK Barber, ...
The Journal of chemical physics 133 (14), 2010
762010
High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths
DL Voronov, M Ahn, EH Anderson, R Cambie, CH Chang, EM Gullikson, ...
Optics letters 35 (15), 2615-2617, 2010
612010
Enhancement of diffraction efficiency via higher-order operation of a multilayer blazed grating
DL Voronov, EM Gullikson, F Salmassi, T Warwick, HA Padmore
Optics letters 39 (11), 3157-3160, 2014
532014
A multiplexed high-resolution imaging spectrometer for resonant inelastic soft X-ray scattering spectroscopy
T Warwick, YD Chuang, DL Voronov, HA Padmore
Journal of synchrotron radiation 21 (4), 736-743, 2014
462014
Controlled Orientation of Block Copolymers on Defect‐Free Faceted Surfaces
SW Hong, DL Voronov, DH Lee, A Hexemer, HA Padmore, T Xu, ...
Advanced Materials 24 (31), 4278-4283, 2012
412012
Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses
M Grisham, G Vaschenko, CS Menoni, JJ Rocca, YP Pershyn, ...
Optics letters 29 (6), 620-622, 2004
412004
High-order multilayer coated blazed gratings for high resolution soft x-ray spectroscopy
DL Voronov, LI Goray, T Warwick, VV Yashchuk, HA Padmore
Optics Express 23 (4), 4771-4790, 2015
352015
Conformal growth of Mo/Si multilayers on grating substrates using collimated ion beam sputtering
DL Voronov, P Gawlitza, R Cambie, S Dhuey, EM Gullikson, T Warwick, ...
Journal of Applied Physics 111 (9), 2012
352012
High-efficiency multilayer blazed gratings for EUV and soft x-rays: recent developments
DL Voronov, M Ahn, EH Anderson, R Cambie, CH Chang, LI Goray, ...
Advances in X-Ray/EUV Optics and Components V 7802, 45-57, 2010
322010
X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching
D Voronov, P Lum, P Naulleau, E Gullikson, A Fedorov, H Padmore
Applied Physics Letters 109 (4), 043112, 2016
302016
Study of fast diffusion species in Sc/Si multilayers by W-based marker analysis
DL Voronov, EN Zubarev, VV Kondratenko, YP Pershin, VA Sevryukova, ...
Thin Solid Films 513 (1), 152-158, 2006
292006
Ultra-high efficiency multilayer blazed gratings through deposition kinetic control
DL Voronov, EH Anderson, EM Gullikson, F Salmassi, T Warwick, ...
Optics Letters 37 (10), 1628-1630, 2012
282012
Calibration of the modulation transfer function of surface profilometers with binary pseudorandom test standards: expanding the application range to Fizeau interferometers and …
VV Yashchuk, EH Anderson, SK Barber, N Bouet, R Cambie, R Conley, ...
Optical Engineering 50 (9), 093604-093604-12, 2011
282011
Optical properties of sliced multilayer gratings
RM Fechtchenko, AV Vinogradov, DL Voronov
Optics communications 210 (3-6), 179-186, 2002
282002
Structure, thermal stability, and reflectivity of Sc/Si and Sc/W/Si/W multilayer x-ray mirrors
AV Vinogradov, YP Pershin, E Zubaryev, DL Voronov, O Penkov, ...
Soft X-Ray Lasers and Applications IV 4505, 230-235, 2001
282001
Binary pseudo-random gratings and arrays for calibration of modulation transfer functions of surface profilometers
SK Barber, ED Anderson, R Cambie, WR McKinney, PZ Takacs, ...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2010
262010
Development of pseudorandom binary arrays for calibration of surface profile metrology tools
SK Barber, P Soldate, EH Anderson, R Cambie, WR McKinney, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009
252009
Refraction effects in soft x-ray multilayer blazed gratings
DL Voronov, F Salmassi, J Meyer-Ilse, EM Gullikson, T Warwick, ...
Optics Express 24 (11), 11334-11344, 2016
222016
Control of surface mobility for conformal deposition of Mo–Si multilayers on saw-tooth substrates
DL Voronov, EH Anderson, EM Gullikson, F Salmassi, T Warwick, ...
Applied surface science 284, 575-580, 2013
222013
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